| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic washing apparatus capable of improving the performance of removing bubbles when discharging bubbles, and washing a substrate without overspending a washing solution discharged together with the bubbles. SOLUTION: This ultrasonic washing apparatus is provided with: a substrate upper face washing head 12 provided above a washing object substrate 44, having ultrasonic oscillators 14 in a box-like head body, and a discharge port 22 at the lower part of the head body discharging the washing solution 20; a substrate lower face washing head 32 provided under the substrate 44, having ultrasonic oscillators 40 in a box-like head body, and a discharge port 42 at the upper part of the head body discharging the washing solution 20; a washing solution supply line 16 supplying the washing solution 20 to the substrate upper face washing head 12; and a communicating line 34 through which residual washing solution 20 supplied to the substrate upper face washing head 12 and not discharged from the discharge port 22 flows to the substrate lower face washing head 32. COPYRIGHT: (C)2007,JPO&INPIT
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