| 摘要 |
An integrated device of an ionizer and an air knife is provided to improve the efficiency of a process by removing a minute dust and a foreign substance which are absorbed on a substrate through the ionizer and the air knife. An integrated device of an ionizer and an air knife includes a distribution pipe(119), a discharging inner space, a tip(117), at least one hole, and a high voltage generator. The distribution pipe supplies a compressed air. The discharging inner space receives the compressed air from the distribution pipe. The tip is installed on at least one side of the discharging inner space. The hole connects the discharging inner space to an external part. The high voltage generator applies a high voltage to the tip installed on the discharging inner space. The integrated device of the ionizer and the air knife is a bar shape. A high voltage which is generated from the high voltage generator is transferred to the tip, is discharged with an air ion and generates a positive ion and a negative ion.
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