MOVABLE LOADLOCK CHAMBER AND SUBSTRATE TREATING APPARATUS COMPRISING THE SAME

摘要

A movable loadlock chamber and a substrate processing apparatus using the same are provided to improve substrate processing capacity thereof by stacking plural chambers, without increasing a volume of a transfer chamber. A movable transfer chamber includes a substrate entrance and a slot valve operating the entrance and positioned towards a movable loadlock chamber(100) or a process chamber. The movable loadlock chamber has first and second stacked chambers(110,120) which are provided with first and second slot valves(130,140) at each side thereof. The first and second chambers are moved up and down by a loadlock chamber driving unit(150).