SIMULATION EQUIPMENT, SIMULATION PROGRAM, AND SIMULATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide simulation equipment which can carry out simulation in a short time considering the interaction between two phenomena of different scales. SOLUTION: The simulation equipment carries out simulation on a semiconductor process of a semiconductor device based on the reaction phenomenon between chemical species used for the semiconductor process and the semiconductor device. This simulation equipment includes a simulator which calculates the probability of reaction between the chemical species and the semiconductor device depending on a fine structure B or a plurality of materials of the semiconductor device or the probability of the deactivation of the chemical species, and then carries out simulation on a physical phenomenon inside a reaction furnace based on the probability of reaction or the probability of deactivation. COPYRIGHT: (C)2007,JPO&INPIT