| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pattern correction device capable of easily deciding whether a correction operation can start or not. <P>SOLUTION: In the pattern correction device, when a correction liquid 20 is started to be atomized in an atomizing part 15, the pressure of an atomizing gas flowing into an atomizing nozzle 21 from a mass flow controller 51 is detected with a pressure sensor 52 to find that the atomized correction liquid 20 is started to be ejected from a coating nozzle 30. Therefore, the decision whether a correction operation can start or not is easy to be done. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
