SHEET PLASMA FILM FORMING APPARATUS

摘要

This invention provides a sheet plasma film forming apparatus (100) comprising a pressure reducing container, a plasma gun (10), an anode (51), plasma fluidizing means, a sheet plasma deformation chamber (20) constituting a part of the pressure reducing container, a pair of permanent magnets (24A, 24B) for deformation to a sheet-shaped plasma, and a film forming chamber (30) constituting a part of the pressure reducing container. The pressure reducing container has first and second bottle neck parts (29, 39) constituting an opening of the film forming chamber (30) and is constructed as follows. The sheet-shaped plasma flows from the sheet plasma deformation chamber (20) into the film forming chamber (30) through the first bottle neck part (29). The sheet-shaped plasma flown into the film forming chamber (30) flows out to the anode (51) through the second bottle neck part (39). The inside dimension of the first and second bottle neck parts (29, 39) is made smaller than the inside dimension of the film forming chamber (30) in the thicknesswise direction of the sheet-shaped plasma.