METHOD OF MAKING AN ELECTRONIC DEVICE COOLING SYSTEM

摘要

A method for manufacturing an electronic device cooling system is provided to reduce the width of a micro-channel and obtain good uniformity of the micro-channel by using an efficient and inexpensive method. A conductive layer is formed on an inner surface of a substrate(12). A sacrificial layer(36) is provided on the conductive layer. A plurality of channels are formed within the sacrificial layer. The channels are charged with a plating material including a conductive material by plating the sacrificial layer. A conductive structure having a fin is formed by etching the sacrificial layer while the conductive material is divided by a micro-channel. A power electronic device is mounted on an outer surface of the substrate.