| 摘要 |
An apparatus for etching a flexible film is provided to minimize surface damages when the flexible film is moved and to etch both surfaces of the flexible film simultaneously by installing etching fluid injection units and etching fluid suction units over and under the flexible film, reciprocally. An apparatus for etching a flexible film includes a housing, upper etching fluid injection units(120), upper etching fluid suction units(130), lower etching fluid injection units(140), and lower etching fluid suction units(150). The housing includes a fluid bath which reserves an etching fluid for etching the flexible film. The upper etching fluid injection units are positioned over the flexible film and inject the etching fluid towards an upper portion of the flexible film. The upper etching fluid suction units are positioned before and behind the upper etching fluid injection units with respect to the moving direction of the flexible film to suction etching fluid residues which remain on the upper portion of the flexible film. The lower etching fluid injection units are positioned under the flexible film to be opposite to the upper etching fluid suction units, respectively, and inject the etching fluid towards a lower portion of the flexible film. The lower etching fluid suction units are positioned under the flexible film to be opposite to the upper etching injection units, respectively, and suction etching fluid residues which remain on the lower portion of the flexible film.
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