发明名称 METHOD FOR PRODUCING BORAZINE COMPOUND AND REACTION VESSEL FOR SYNTHESIZING BORAZINE COMPOUND
摘要 PROBLEM TO BE SOLVED: To provide a means for suppressing the outflow of a borazine compound under reaction to the exterior of a reaction vessel when synthesizing the borazine compound, and for inhibiting the ignition of the borazine compound under synthesis. SOLUTION: The method for producing the borazine compound involves a step for synthesizing the borazine compound in the reaction vessel having a resisting pressure of≥0.1 MPa. The reaction vessel for synthesizing the borazine compound has the resisting pressure of≥0.1 MPa. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007137865(A) 申请公布日期 2007.06.07
申请号 JP20050337685 申请日期 2005.11.22
申请人 NIPPON SHOKUBAI CO LTD 发明人 YAMAMOTO TETSUYA;KAMIYAMA TAKUYA;KITADA RITSUO
分类号 C07F5/05;H01L21/318 主分类号 C07F5/05
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