| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus capable of easily changing the shape of the condensed spot of laser beams into a circular shape or an elliptical shape with different ratio of the major axis to the minor axis. <P>SOLUTION: The laser beam machining apparatus comprises a chuck table for holding a work, and a laser beam emission means for emitting laser beams on the work held by the chuck table. The laser beam emission means comprises a laser beam oscillation means for oscillating laser beams, and a condenser for condensing the laser beams oscillated by the laser beam oscillation means. The condenser comprises a first cylindrical lens unit having a first cylindrical lens, a second cylindrical lens unit having a second cylindrical lens positioned in the direction with the condensing direction thereof orthogonal to that of the first cylindrical lens, and a spacing adjustment mechanism for adjusting the spacing between the first cylindrical lens unit and the second cylindrical lens unit. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
