| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment apparatus capable of stacking in a high density state and heat-treating the objects to be heated. SOLUTION: The heat treatment apparatus 1 is provided with a rack 10 in the interior of a heating chamber 3a. Multiple shelf members 20 are stacked in a frame member 11 of the rack 10. The shelf member 20 has a base part 21, and placement part 22b with a relative position, with respect to the base part 21 deviated upward. When the shelf members 20 are stacked vertically, a gap allowing placement of a substrate W is formed between placement parts 22b, 22b. A region, allowing the insertion and withdrawal of a robot hand, is formed on a side of the placement part 22b. COPYRIGHT: (C)2007,JPO&INPIT
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