| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a signal transmission circuit device and its manufacturing method which reduces the dielectric loss of a signal transmission circuit at a low cost to improve its electric reliability. <P>SOLUTION: A thin film of ion-migrated Pyrex (R) glass 3 anodic-bonded to a silicon substrate 2 is provided between, e.g., a CPW 5 constituting a signal transmission circuit and the silicon substrate 2. Accordingly, a signal flowing in the CPW 5 reduces the dielectric loss resulting from the Pyrex (R) glass 3 and the silicon substrate 2. Since the Pyrex (R) glass 3 of a low cost is usable, compared with the quartz substrate; the circuit device 1 allows the cost to be down. <P>COPYRIGHT: (C)2007,JPO&INPIT |
