| 摘要 |
PROBLEM TO BE SOLVED: To provide an axisymmetric aspheric surface polishing method, simply correcting a polishing target value in a short time to polish an axisymmetric aspheric surface even when the polishing removing amount of an axisymmetric aspheric surface extending from the central axis of rotation to the peripheral edge part has a tendency of excess or shortage, thereby making the axisymmetric aspheric surface into a favorable optical surface. SOLUTION: In this axisymmetric aspheric surface polishing method, the axisymmetric aspheric surface 1 after grinding is rotated round the center axis C of rotation of the axisymmetric aspheric surface 1, a rotating spherical polisher 6 is pressed from the normal direction of the axisymmetric aspheric surface 1, and scanned in the direction of a meridian to polish the whole of the axisymmetric aspheric surface 1. The method includes a correcting and polishing process of changing the ratio of the rotational frequency of the axisymmetric aspheric surface 1 to the rotational frequency of the polisher 6 after polishing the whole of the axisymmetric aspheric surface 1 to perform polishing. COPYRIGHT: (C)2007,JPO&INPIT
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