| 摘要 |
The invention relates to a large-capacity high-temperature effusion cell intended for vaporizing materials for molecular beam epitaxy machines, comprising a crucible support (2) of elongate shape, at least one refractory crucible (1) also of elongate shape, a crucible heater (7) surrounding said crucible (1) and a thermal shield (6) surrounding the crucible support (1). According to the invention, the effusion cell comprises at least two crucibles (1) placed around the axis of symmetry (5) of the crucible support (2). |
