CARBON NANOTUBES AS INTERCONNECTS IN INTEGRATED CIRCUITS AND METHOD OF FABRICATION
摘要
<p>A method of making an electrode, such as an interconnect for a semiconductor device, includes forming aligned carbon nanotubes using dielectrophoresis.</p>
申请公布号
WO2007064530(A1)
申请公布日期
2007.06.07
申请号
WO2006US45038
申请日期
2006.11.21
申请人
UNIDYM;DUKE UNIVERSITY;LIU, JIE;MORRAL, ANNA, FONTCUBERTA I
