METHOD AND APPARATUS FOR CLASSIFYING MANUFACTURING OUTPUTS
摘要
<p>A method for process monitoring involves acquiring data samples associated with a plurality of manufacturing related variables for a plurality of outputs of a manufacturing process. The distance of each data sample relative to every other data sample is then calculated. The outputs are then grouped based on the Euclidean distances that satisfy a boundary determining criterion.</p>
申请公布号
WO2007064933(A1)
申请公布日期
2007.06.07
申请号
WO2006US46084
申请日期
2006.12.01
申请人
MKS INSTRUMENTS, INC.;HENDLER, LAWRENCE;RICHTER, MATTHEW