发明名称 METHOD AND APPARATUS FOR CLASSIFYING MANUFACTURING OUTPUTS
摘要 <p>A method for process monitoring involves acquiring data samples associated with a plurality of manufacturing related variables for a plurality of outputs of a manufacturing process. The distance of each data sample relative to every other data sample is then calculated. The outputs are then grouped based on the Euclidean distances that satisfy a boundary determining criterion.</p>
申请公布号 WO2007064933(A1) 申请公布日期 2007.06.07
申请号 WO2006US46084 申请日期 2006.12.01
申请人 MKS INSTRUMENTS, INC.;HENDLER, LAWRENCE;RICHTER, MATTHEW 发明人 HENDLER, LAWRENCE;RICHTER, MATTHEW
分类号 G05B23/02 主分类号 G05B23/02
代理机构 代理人
主权项
地址
您可能感兴趣的专利