Kontakt-Temperatursensor mit thermischer Entkopplung zwischen Sensorkopf und Hitzeschild der elektrischen Zuleitungen,申请号DE20006034496-传众专利搜索

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发明名称	Kontakt-Temperatursensor mit thermischer Entkopplung zwischen Sensorkopf und Hitzeschild der elektrischen Zuleitungen
摘要
申请公布号	DE60034496(D1)	申请公布日期	2007.06.06
申请号	DE20006034496	申请日期	2000.01.31
申请人	AXCELIS TECHNOLOGIES INC.	发明人	BURKE, JOHN WILLIAM;CARDOSO, ANDRE GIL;MCGINNITY, JOSEPH GERARD
分类号	G01K1/14;G01K7/00;G01K1/16;G01K7/02	主分类号	G01K1/14
代理机构		代理人
主权项
地址

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