发明名称 SYSTEM FOR TRANSFERRING SEMICONDUCTOR WAFER
摘要 A system for transferring a semiconductor wafer is provided to improve the efficiency of a transfer process of the semiconductor wafer by reducing the loss of the process. A system for transferring a semiconductor wafer includes a wafer carrier(20), a wafer detection section(30), and a screen display section(40). The wafer carrier has a carrier body forming an accommodation space and a plurality of wafer slots installed in the accommodation space of the carrier body, into which wafers are inserted. The wafer detection section is installed adjacent to the wafer carrier to detect existence of wafers in the wafer slots. The wafer detection section detects the existence of the wafers in the wafer slots in real time. The screen display section displays the existence of the wafers with respect to the wafer slots on the basis of the detection result.
申请公布号 KR20070056228(A) 申请公布日期 2007.06.04
申请号 KR20050114596 申请日期 2005.11.29
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, JIN HYUK;SON, HONG SEONG
分类号 B65G61/00;B25J11/00;B25J19/00 主分类号 B65G61/00
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