| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance sterilization performance and to shorten a post-treatment time after sterilization concerning a system for sterilizing a treating chamber by using hydrogen peroxide. <P>SOLUTION: A system architecture having air conditioning unit side circuit (10) equipped with outside air treating air conditioner (13), sensible heat air conditioner (17) and filter means, such as HEPA filter (14), so as to carry out air conditioning of treating chamber (2) and sterilization unit side circuit (30) equipped with hydrogen peroxide generator (31) so as to carry out sterilization of the treating chamber (2), which system architecture comprises air supply side communication channel (39) for introduction of out side air from the outside air treating air conditioner (13) into the sterilization unit side circuit (30) and comprises return air side communication channel (38) for return of air from hydrogen peroxide decomposer (36) connected in parallel to the hydrogen peroxide generator (31) in the sterilization unit side circuit (30) into the outside air treating air conditioner (13). <P>COPYRIGHT: (C)2007,JPO&INPIT |
