| 摘要 |
The present invention relates to a laser fuse structure for high power applications. Specifically, the laser fuse structure of the present invention comprises first and second conductive supporting elements ( 12 a , 12 b), at least one conductive fusible link ( 14 ), first and second connection elements ( 20 a , 20 b), and first and second metal lines ( 22 a , 22 b). The conductive supporting elements ( 12 a , 12 b), the conductive fusible link ( 14 ), and the metal lines ( 22 a , 22 b) are located at a first metal level ( 3 ), while the connect elements ( 20 a , 20 b) are located at a second, different metal level ( 4 ) and are connected to the conductive supporting elements ( 12 a , 12 b) and the metal lines ( 22 a , 22 b) by conductive via stacks ( 18 a , 18 b , 23 a , 23 b) that extend between the first and second metal levels ( 3, 4 ).
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