| 发明名称 |
ORGANOMETALLIC PRECURSOR COMPOUNDS |
| 摘要 |
This invention relates to organometallic precursor compounds represented by the formula i-PrN=Ta(NR<SUB>1</SUB>R<SUB>2</SUB>)<SUB>3</SUB> wherein R<SUB>1</SUB> and R<SUB>2</SUB> are the same or different and are alkyl having from 1 to 3 carbon atoms, provided that (i) when R<SUB>1</SUB> is ethyl, then R<SUB>2</SUB> is other than ethyl and (ii) when R<SUB>2</SUB> is ethyl, then R<SUB>1</SUB> is other than ethyl, and a method for producing a film, coating or powder from the organometallic precursor compounds. |
| 申请公布号 |
WO2005112101(A3) |
申请公布日期 |
2007.05.31 |
| 申请号 |
WO2005US16053 |
申请日期 |
2005.05.09 |
| 申请人 |
PRAXAIR TECHNOLOGY, INC.;ZHANG, DELONG;HOOVER, CYNTHIA, A. |
发明人 |
ZHANG, DELONG;HOOVER, CYNTHIA, A. |
| 分类号 |
C07F9/00;C23C16/18;C23C16/34;H01L21/285;H01L21/31;H01L21/44;H01L21/469 |
主分类号 |
C07F9/00 |
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