摘要 |
PURPOSE:To reduce the size of a tester by constituting the tester such that an optical semiconductor device to be tested and a measuring circuit portion are accommodated in the same casing and the measuring circuit unit is cooled by cooling means. CONSTITUTION:A first printed circuit board 1 provided with optical semiconductor devices LD1, LD2- and a second printed circuit board 2 so provided with photosensitive elements PD1, PD2- as to oppose the semiconductor devices LD1, LD2-, respectively, are overlappingly provided in a casing 3. On the opposite side of these board 1 and 2, a measuring circuit unit 4 and cooling means 5 are provided. In a test, the optical semiconductor devices LD1, LD2- are heated to a prescribed temperature by heating means 6. At this time, since cooled by the cooling means 5, the measuring circuit 4 is in no danger of deterioration or the like. The measuring circuit 4 obtains measured data before and after above-described heating by a scanning and outputs the data outside.
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