| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a liquid droplet discharge device which enhances the profile controllability of a pattern comprised of liquid droplets by stabilizing the optical properties of an energy beam cast on the liquid droplets. <P>SOLUTION: The liquid droplet discharge device is provided with a washing tank 41 to store a washing liquid on the base of the liquid droplet discharge device and introduces or discharges the washing liquid Fc by linking a washing liquid supply part 42 and a washing liquid discharge part 43 with the washing tank 41. A head unit 30 is transferred just above the washing tank 41, a reflection mirror M is immersed in the side of the introduction tube 41a to introduce the washing liquid Fc and a discharge head 32 is immersed in the side of the discharge tube 41b to discharge the washing liquid Fc. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
