| 摘要 |
<P>PROBLEM TO BE SOLVED: To selectively remove micro-cyclic convex parts appearing on the surface of a film even such as an LPE (thin film crystal manufacturing device) film, a large, thin and bent film, to make the surface flat and to realize an internal structure, which is uniform in form and very fine, with high density. <P>SOLUTION: Micro-cyclic concave and convex parts 16 are two-dimensionally arranged and formed lengthwise and crosswise on the surface of a nonmagnetic substrate 10, and magnetic garnet crystal is grown on the whole surface of the concave or convex parts by means of an LPE method to form the LPE film 20 having a surface reflecting the concave and convex shapes of the nonmagnetic substrate. Then, the surface of the LPE film is rubbed with a magnetic brush to which abrasion grains produced by a magnetic grinding method stick or which contains such abrasion grains to selectively grind and remove the convex parts of the surface of the LPE film, and a magneto-optical device in which the surface of the LPE film are made flat can be manufactured. <P>COPYRIGHT: (C)2007,JPO&INPIT |
