| 摘要 |
PROBLEM TO BE SOLVED: To provide an infrared microscope having a calibration function capable of achieving calibration of high reliability, and a calibration method of the infrared microscope. SOLUTION: The infrared microscope using, as illumination light, infrared light which permeates a silicone member and performs observation comprises an objective lens 12 where aberration occurring when the infrared light permeates the silicone member is previously corrected, a reference sample 11 for calibration arranged on the optical axis of the objective lens 12, a silicon chip 9 having a characteristic equivalent to the silicone member, and a silicone holding tool 8 for holding the silicon chip on an optical path between the objective lens 12 and the reference sample 11 for calibration. COPYRIGHT: (C)2007,JPO&INPIT
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