| 摘要 |
PROBLEM TO BE SOLVED: To reduce a burden on the filter for removing chemical contaminants and particle contaminants, by properly removing chemical contaminants from the air supplied to a storage space and by efficiently circulating a part of the air delivered from the storage space. SOLUTION: A storage space 4 in which the air is always allowed to pass through by a ventilating means 3 is provided in the flow path between an air intake 1 and an exhaust 2. The secondary side 4b of the storage space 4 communicates with a mixing chamber 5 that communicates both the air intake 1 and the exhaust 2. A filter 6 for removing chemical contaminants and a filter 7 for removing particle contaminants are interposed between the mixing chamber 5 and a primary side 4a of the storage space 4. COPYRIGHT: (C)2007,JPO&INPIT
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