| 摘要 |
PURPOSE:To obtain a part of this design excellent in hermetical property by a method wherein a nickel plating or a copper oxide film is formed on a cooling plate formed of pure copper, which is irradiated with radiation of high energy for welding the end of bellows core of beryllium-copper. CONSTITUTION:A cooling part, with a bellows in which coolant is circulated, is composed of a cooling plate 3 contacted with a large scale integrated circuit 6 and a bellows core 2 connected with the cooling plate 3. In this processing, a nickel plating or a copper oxide film is formed onto the cooling plate 3 of pure copper, then the end of the bellows core 2 is welded through irradiation of the high energy radiation. As a nickel plating or a copper oxide film is formed on the surface of the copper plate and this plating or film is small in thermal conductivity and reflectivity, the end of a bellows core can be welded through irradiation of the high energy radiation. By these processes, high airtightness can be obtained. |
