SEMICONDUCTOR PROCESSING EQUIPMENT HAVING RADIANT HEATED CERAMIC LINER,申请号EP20000961776-传众专利搜索

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发明名称	SEMICONDUCTOR PROCESSING EQUIPMENT HAVING RADIANT HEATED CERAMIC LINER
摘要
申请公布号	EP1214732(B1)	申请公布日期	2007.05.30
申请号	EP20000961776	申请日期	2000.09.11
申请人	LAM RESEARCH CORPORATION	发明人	KENNEDY, WILLIAM, S.;MARASCHIN, ROBERT, A.;WICKER, THOMAS, E.
分类号	B01J19/08;H01L21/00;H05H1/46;B01J19/02;C04B35/565;C23C16/44;H01L21/3065	主分类号	B01J19/08
代理机构		代理人
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