发明名称 |
Process for the production of nitrogen trifluoride |
摘要 |
The present invention is directed to an improved reaction process that allows for the achievement of excellent NF 3 production yields, while minimizing the amount of unreacted fluorine exiting with the process gases and minimizing the amount of liquid melt waste (HF/NH 3 ) produced by the process. The basic NF 3 process resides in reacting F 2 with an ammonium ion source, e.g., ammonium acid fluoride, under conditions for forming NF 3 . The improvement in the process comprises: introducing F 2 and said ammonium ion source cocurrently and downflow through a packed column or monolith column at a first temperature; reacting said F 2 and ammonium ion source in said column; and, removing a mixture of NF 3 and byproducts from said column at a second temperature higher than said first temperature. |
申请公布号 |
ZA200507484(B) |
申请公布日期 |
2007.05.30 |
申请号 |
ZA20050007484 |
申请日期 |
2005.09.16 |
申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
DHOLAKIA, VIPUL P;TSIRUKIS, ATHANASIOS GEORGIOS;ZEHNDER, ANTHONY J.;BOEHME, RICHARD PETER |
分类号 |
C01B |
主分类号 |
C01B |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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