发明名称 |
DUCT HEATING STRUCTURE AND DUCT HEATING HEAT INSULATING MATERIAL |
摘要 |
PROBLEM TO BE SOLVED: To provide a duct heating structure which reduces an influence to a peripheral unit such as precise equipment, etc. SOLUTION: The duct heating structure heats a duct 10 covered with heat insulating materials 50, 50 by using a heater wire 23. In order to reduce a magnetic action of an electromagnetic field generated by energizing the heater wire 23, the heater wire 23b to be energized in a facing direction is approached to the heater wire 23a to be energized in one direction and is arranged on the surface of the duct 10. COPYRIGHT: (C)2004,JPO
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申请公布号 |
JP2004150541(A) |
申请公布日期 |
2004.05.27 |
申请号 |
JP20020316765 |
申请日期 |
2002.10.30 |
申请人 |
OMI TADAHIRO;TOKYO ELECTRON LTD;NICHIAS CORP |
发明人 |
OMI TADAHIRO;SUENAGA OSAMU;MOTOYOSHI YOSHIYUKI;WADASAKO MITSUYUKI;OMURA TAKAHIRO;KOBAYASHI TSUTOMU |
分类号 |
F16L53/00;(IPC1-7):F16L53/00 |
主分类号 |
F16L53/00 |
代理机构 |
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