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发明名称
CVD DEVICE
摘要
申请公布号
JPH05271950(A)
申请公布日期
1993.10.19
申请号
JP19920067998
申请日期
1992.03.26
申请人
发明人
分类号
C23C16/50;H01L21/31;(IPC1-7):C23C16/50
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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