| 摘要 |
PROBLEM TO BE SOLVED: To improve production efficiency by quickly transferring a substrate to a deburring process after cutting the substrate into pieces. SOLUTION: A high pressure water jet unit 70 provided with a nozzle 72 for performing deburring by jetting high pressure water to the substrate 1 (device 5) is arranged in a cutting area 50 of a cutting unit 60 for cutting the substrate 1 into pieces of devices 5. COPYRIGHT: (C)2007,JPO&INPIT |
