发明名称 SEMICONDUCTOR DEVICE COMPRISING DRAM AND NON-VOLATILE MEMORY
摘要 <P>PROBLEM TO BE SOLVED: To solve the problem in the prior art wherein material quality/thickness of the insulting film between a control gate and a floating gate in a non-volatile memory are set to the optimum material/thickness can not be made optimum for non-volatile memory, without increasing the manufacturing steps, at the loading both DRAM and non-volatile memory (for example, flash memory) on the same semiconductor substrate. <P>SOLUTION: A wire is made to function as a control gate, and a contact and a gate electrode, connected to this contact, are made to function as a floating gate. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007129040(A) 申请公布日期 2007.05.24
申请号 JP20050319857 申请日期 2005.11.02
申请人 NEC ELECTRONICS CORP 发明人 KITAMURA TAKUYA;SAKO TAKASHI
分类号 H01L27/10;G11C29/12;H01L21/8242;H01L21/8247;H01L27/108;H01L27/115;H01L29/788;H01L29/792 主分类号 H01L27/10
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