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发明名称
THIN FILM DEPOSITION FROM ATOMIC LAYER DEPOSITION OR CHEMICAL VAPOR DEPOSITION AND THEIR USES
摘要
申请公布号
KR20070052161(A)
申请公布日期
2007.05.21
申请号
KR20050109881
申请日期
2005.11.16
申请人
UP CHEMICAL CO., LTD.
发明人
SHIN, HYUN KOOCK;KIM, BUM SOO;KIM, JIN SIK;KIM, JUN YOUNG;KIM, YOUNG SEOP;CHO, BO YEARN
分类号
C23C16/18
主分类号
C23C16/18
代理机构
代理人
主权项
地址
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