TITANIUM COMPLEXES, PROCESS FOR PRODUCTION THEREOF, TITANIUM -CONTAINING THIN FILMS, AND METHOD FOR FORMATION THEREOF

摘要

The invention relates to novel titanium complexes which have excellent vaporization characteristics and thermal stability and are useful as raw material in forming titanium-containing thin films by CVD, ALD, or the like; a process for the production of the complexes; titanium-containing thin films formed by using the complexes; and a method for formation of the films. According to the invention, a titanium complex represented by the general formula (1) is produced by reacting a diimine represented by the general formula (2) with metallic lithium and then with a tetrakisamido complex represented by the general formula (3) and a titanium-containing thin film is formed by using the titanium complex as the raw material: [Chemical formula 1] (2) [Chemical formula 2] Ti(NR<SUP>5</SUP>R<SUP>6</SUP>)<SUB>4</SUB> (3) [Chemical formula 3] (1) wherein R<SUP>1</SUP> and R<SUP>4</SUP> are each alkyl of 1 to 6 carbon atoms, or the like; R<SUP>2</SUP> and R<SUP>3</SUP> are each independently hydrogen, alkyl of 1 to 3 carbon atoms, or the like; and R<SUP>5</SUP> and R<SUP>6</SUP> are each independently alkyl of 1 to 4 carbon atoms, or the like.