发明名称 GLASS SUBSTRATE STORAGE CASE, GLASS SUBSTRATE EXCHANGE DEVICE, GLASS SUBSTRATE MANAGEMENT DEVICE, GLASS SUBSTRATE DISTRIBUTION METHOD, SEAL MEMBER, AND SEAL STRUCTURE USING THE SEAL MEMBER
摘要 <p>To provide a glass substrate storage case capable of preventing quality deterioration of a glass substrate, a glass substrate transfer apparatus automatically transferring a glass substrate from the glass substrate storage case to another case; a glass substrate management apparatus managing glass substrates individually, a glass substrate distribution method for trading a glass substrate while storing the glass substrate in a specialized glass substrate storage case, a sealing member improving a sealing effect, and a sealing structure using the sealing member. The glass substrate storage case includes: a bottom member 12 on which a reticle R is placed; a cover member 20 overlaid on the bottom member 12 so as to cover the reticle R placed on the bottom member 12 and to form a space portion between the cover member 20 and the bottom member 12 ; a sealing member 18 provided in the bottom member 12 and/or the cover member 20 to keep the space portion airtight in a state where the cover member 20 is overlaid on the bottom member 12 ; and hook members 24 provided on the cover member 20 and hooked to the bottom member 12 to maintain the state where the cover member 20 is overlaid on the bottom member 12.</p>
申请公布号 KR20070050401(A) 申请公布日期 2007.05.15
申请号 KR20067024877 申请日期 2006.11.27
申请人 NIPPON VALQUA INDUSTRIES, LTD.;HAKUTO CO., LTD.;WINS, LTD. 发明人 UMEDA TOSHIYA;OSADA ATSUSHI;KAWASHIMA HIDEAKI;YOSHIDA TSUTOMU
分类号 B65D85/86;B65D45/20;B65D53/00;F16J15/10;G03F1/66;H01L21/027;H01L21/673;H01L21/677 主分类号 B65D85/86
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