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发明名称
METHOD FOR PRODUCING NANOWIRE USING POROUS GLASS TEMPLATE AND METHOD FOR PRODUCING MULTI-PROBE
摘要
申请公布号
KR20070050333(A)
申请公布日期
2007.05.15
申请号
KR20060034947
申请日期
2006.04.18
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
LEE, EUN KYUNG;CHOI, BYOUNG LYONG;KWON, SOON JAE;CHO, KYUNG SANG;LEE, JAE HO
分类号
H01L21/20;B82B3/00
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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