| 摘要 |
PROBLEM TO BE SOLVED: To precisely detect a stylus trace on a pad, after inspecting electrically the pad included in a wiring pattern formed on a substrate, by bringing the pad into contact with a probe. SOLUTION: This stylus trace detector acquires an object image of multigradation indicating an area including the pad on the substrate by an imaging part, acquires a pad area indicating an area of the pad from the object image by a pad area acquisition part 42 of a processing part 40. A stylus trace acquisition part 43 compares a value of each picture element in the pad area with the first-fourth threshold values to specify an intermediate picture element having a value of the first threshold value or more and less than the second threshold value, or a value of the third threshold value or more and less than the fourth threshold value, and a stylus trace picture element having a value less than the first threshold value or of fourth threshold value or more. The picture element adjacent to any of the stylus trace picture elements is changed into the stylus trace picture element, as to a line direction out of the intermediate picture elements, and a set of the stylus trace picture elements is acquired as a stylus trace area. The stylus trace on the pad is precisely detected by this manner, even when a concentration difference between the stylus trace area and a non-stylus-trace area is small in the pad area in the object image. COPYRIGHT: (C)2007,JPO&INPIT
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