| 摘要 |
PROBLEM TO BE SOLVED: To provide a probing device having a probe which is easy to handle, when it is processed or replaced. SOLUTION: The probe 1 of the probing device consists of a cylindrical holding part 3, made of a second electrically conductive material and a probe member 2 which is provided at nearly the central part of one end face of the holding part 3 and has a sharp-pointed shape, consisting of a conical part and a cylindrical part which are made of a first electrically conductive material. The diameter of the probe member 2 is set to be not larger than 100μm, the diameter of the holding part 3 is set to be not smaller than 100μm, and the relation between the length L of the probe member 2 and the diameter R of the holding part 3 is set to be L>R/2. COPYRIGHT: (C)2007,JPO&INPIT
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