| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection system which identifies the contents and a direction of a housing at a low cost. <P>SOLUTION: The inspection system 1 has an inspection chamber 3, and a bar-code reader 5, which is a reading device, is provided on the side face of the inspection chamber 3. An object to be inspected by the inspection system 1 is a housing 7, and the housing 7 is formed by covering a pallet 9 with a cover 11. Specimens such as substrates, which are not shown in Figure, are placed in the housing 7. Bar codes 13a and 13b, which are identification slips indicating the contents of the housing 7, are pasted on the cover 11. When the bar-code reader 5 can identify the bar code 13a at the inspection, the direction of the housing 7 and the kinds of the specimens are determined to be right, and, when the bar-code reader 5 can not identify the bar code 13a, the direction of the housing 7 is determined to be wrong. <P>COPYRIGHT: (C)2007,JPO&INPIT |
