| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique capable of restraining the charges generated by electron beam irradiation from accumulating in a measuring sample, in a probing device that uses an SEM (scanning electron microscope) as the observation means. SOLUTION: A plurality of probes 10 is operated, while observing a SEM image imaged on an operation screen, and tips thereof are brought into contact with respective patterns of the sample 8, the charges generated by the electron beam irradiation, when observing the SEM image, is neutralized by irradiating the sample 8 with ultraviolet rays from a light source part 3 and an optical system 4 installed outside a chamber 5, and the charges are restrained thereby from accumulating in the sample 8. COPYRIGHT: (C)2007,JPO&INPIT
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