MICROPUMP AND MICRO FLUID CHIP

摘要

[PROBLEMS] To improve operability of a micropump for very low flow rate utilizing a membrane permeation flow caused by electric effect of a flow passing through a micro region. [MEANS FOR SOLVING PROBLEMS] A micropump for very low flow rate comprising a shell having a through hollow portion, and a porous membrane interposed between a plus electrode and a minus electrode and so arranged in the hollow portion as to divide it into two, and utilizing electroosmosis effect of a flow passing through the porous membrane, characterized in that a bypass channel for filling liquid is arranged to communicate with the lower space of the hollow portion divided into two by the porous membrane, and an air vent channel is arranged to communicate with the atmosphere from the lower space. In the micropump, the inlet of the air vent channel opening to the inside of the lower space has a height from the bottom face of the lower space which is preferably set to be larger than the height of the outlet of the bypass channel opening to the inside of the lower space from the bottom face of the lower space.