DEVICE FOR APPLYING SEMICONDUCTOR TREATMENT TO TREATMENT SUBJECT SUBSTRATE,申请号KR20077005941-传众专利搜索

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发明名称	DEVICE FOR APPLYING SEMICONDUCTOR TREATMENT TO TREATMENT SUBJECT SUBSTRATE
摘要
申请公布号	KR20070049215(A)	申请公布日期	2007.05.10
申请号	KR20077005941	申请日期	2007.03.14
申请人	TOKYO ELECTRON LIMITED	发明人	ASAKURA KENTARO
分类号	C23C16/44;H01L21/68;H01L21/00;H01L21/683;H01L21/687	主分类号	C23C16/44
代理机构		代理人
主权项
地址

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