发明名称 |
MULTI-BEAM MICRO-MACHINING SYSTEM AND METHOD |
摘要 |
<p>A system for delivering energy to a substrate including a dynamically directable source of radiant energy providing a plurality of beams of radiation, each propagating in a dynamically selectable direction. Independently positionable beam steering elements in a plurality of beam steering elements are operative to receive the beams and direct them to selectable locations on the substrate.</p> |
申请公布号 |
EP1451907(A4) |
申请公布日期 |
2007.05.09 |
申请号 |
EP20020738586 |
申请日期 |
2002.06.13 |
申请人 |
ORBOTECH LTD. |
发明人 |
LIPMAN, ELIEZER;KOTLER, ZVI;GROSS, ABRAHAM |
分类号 |
G02B26/08;B23K26/04;B23K26/06;B23K26/073;B23K26/14;B23K26/38;B23K26/382;B23K26/402;B23K101/42;G02B27/14;G02F1/33;H01S3/00;H01S3/11;H05K3/00 |
主分类号 |
G02B26/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|