PENCIL CLEANER OF CHEMICAL MECHANICAL POLISHING DEVICE AND IT'S RUNNING METHOD

摘要

A pencil cleaner of chemical mechanical polishing equipment and its operating method are provided to simplify a process procedure and a cleaning time of the pencil cleaner by modifying a structure of the pencil cleaner. A cup(4) of a pencil cleaner(100) is incised to form a dissection unit(5). A nozzle(11) of the pencil cleaner is moved to an upper position. A position of the dissection unit is a path when a pencil arm(1) performs a swing operation. The reason of using the dissection unit is to allow the pencil arm to move to a pencil arm self cleaner(10). The nozzle sprays a cleaning water to clean a pencil brush(2). The pencil brush is cleaned without falling the pencil arm by controlling a position of the nozzle.