| 发明名称 |
Micromirror devices with in-plane deformable hinge |
| 摘要 |
Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
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| 申请公布号 |
US7215459(B2) |
申请公布日期 |
2007.05.08 |
| 申请号 |
US20050056732 |
申请日期 |
2005.02.11 |
| 申请人 |
REFLECTIVITY, INC. |
发明人 |
HUIBERS ANDREW;PATEL SATYADEV;DOAN JONATHAN;DUNPHY JAMES;SIMONIAN DMITRI;SHI HONGQIN;ZHANG JIANGLONG |
| 分类号 |
G02B26/00;G02B26/08 |
主分类号 |
G02B26/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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