发明名称 |
Method for cleaning a ceramic member for use in a system for producing semiconductors, a cleaning agent and a combination of cleaning agents |
摘要 |
The present invention provides a method for cleaning a ceramic member for use in a system for producing semiconductors. The method has the step of cleaning the ceramic member with an organic acid or a weak acid. Preferably, the ceramic member is cleaned with a strong acid before the cleaning with an organic acid or a weak acid. The ceramic member may be subjected to a blasting treatment before the cleaning with an organic acid or a weak acid. According to the method, the amount of metal transferred from the ceramic member to a semiconductor may be considerably reduced.
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申请公布号 |
US7211156(B2) |
申请公布日期 |
2007.05.01 |
申请号 |
US20050032939 |
申请日期 |
2005.01.11 |
申请人 |
NGK INSULATORS, LTD. |
发明人 |
YAMAGUCHI SHINJI;KIKU TAIJI;KONDOU NOBUYUKI |
分类号 |
B08B3/12;B08B7/00;B08B3/08;B08B7/04;C11D7/20;C11D7/26;C11D11/00;H01L21/00;H01L21/304;H01L21/683 |
主分类号 |
B08B3/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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