APPARATUS AND METHOD FOR CONTROLLING THE FOCAL POINT POSITION OF UV LIGHT AND APPARATUS AND METHOD FOR INSPECTION,申请号KR20000053999-传众专利搜索

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发明名称	APPARATUS AND METHOD FOR CONTROLLING THE FOCAL POINT POSITION OF UV LIGHT AND APPARATUS AND METHOD FOR INSPECTION
摘要
申请公布号	KR100711173(B1)	申请公布日期	2007.04.27
申请号	KR20000053999	申请日期	2000.09.14
申请人		发明人
分类号	G01B11/00;H01L21/66;G01N21/95;G01N21/956;G01R31/28;G01R31/311;G03F7/20	主分类号	G01B11/00
代理机构		代理人
主权项
地址

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