Apparatus and method for etching,申请号KR20000077423-传众专利搜索

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发明名称	Apparatus and method for etching
摘要
申请公布号	KR100712472(B1)	申请公布日期	2007.04.27
申请号	KR20000077423	申请日期	2000.12.16
申请人		发明人
分类号	H01L21/3063	主分类号	H01L21/3063
代理机构		代理人
主权项
地址

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