发明名称 GALLIUM NITRIDE SEMICONDUCTOR DEVICE WITH IMPROVED TERMINATION SCHEME
摘要 This invention discloses a gallium nitride based semiconductor power device disposed in a semiconductor substrate. The power device comprises a termination area disposed at a peripheral area of the semiconductor power device comprises a termination structure having at least a guard ring disposed in a trench filled with doped gallium-based epitaxial layer therein.
申请公布号 US2014225120(A1) 申请公布日期 2014.08.14
申请号 US201313763649 申请日期 2013.02.09
申请人 Zhu Tinggang 发明人 Zhu Tinggang
分类号 H01L29/20;H01L29/872 主分类号 H01L29/20
代理机构 代理人
主权项 1. A gallium nitride based semiconductor power device comprising: a termination area disposed at a peripheral area of the semiconductor power device comprises a termination structure having at least a guard ring disposed in a trench filled with P-doped gallium-based epitaxial layer therein.
地址 Cupertino CA US